Influence of the atmospheric species water, oxygen, nitrogen and carbon dioxide on the degradation of aluminum doped zinc oxide layers.

Aluminum doped zinc oxide (ZnO:Al) layers were exposed to the atmospheric gases carbon dioxide (CO2), oxygen (O2), nitrogen (N2) and air as well as liquid H2O purged with these gases, in order to investigate the chemical degradation behavior of these layers. The samples were analyzed by electrical, compositional and optical measurements before, during and after […]